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Patent # Description
2019/0066985 ASSEMBLY PROVIDED WITH COOLANT FLOW CHANNEL, METHOD OF CONTROLLING ASSEMBLY PROVIDED WITH COOLANT FLOW CHANNEL,...
An assembly provided with a coolant flow channel includes a base in which the coolant flow channel is formed; and a protrusion component that is disposed in...
2019/0066984 PROCESSING CHAMBER AND METHOD WITH THERMAL CONTROL
A processing chamber and a processing method for processing a substrate in the processing chamber with thermal control are described herein. The method...
2019/0066983 SHROUDS AND SUBSTRATE TREATING SYSTEMS INCLUDING THE SAME
Shrouds and substrate treating systems including the same are provided. Substrate treating systems may include a process chamber, a supporter, and a plasma...
2019/0066982 MEASURING DEVICE, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
A measuring device includes a switch that switches a connection of an electrode to which a direct current voltage is applied, wherein the electrode is within...
2019/0066981 PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD
A plasma processing device has a chamber that can be depressurized, a plasma source to generate plasma in the chamber, a stage in the chamber on which the...
2019/0066980 Ceramic Material Assembly For Use In Highly Corrosive Or Erosive Semiconductor Processing Applications
A composite assembly of a relatively inexpensive ceramic, such as alumina, with a skin, or covering, of a high wear ceramic, such as sapphire, adapted to be...
2019/0066979 SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH A LOW ANGULAR SPREAD
Systems and methods for increasing peak ion energy with a low angular spread of ions are described. In one of the systems, multiple radio frequency (RF)...
2019/0066978 SUBSTRATE PROCESSING APPARATUS
A plasma supply unit includes a first conductive portion, a second conductive portion having at least a part extending to overlap the first conductive portion,...
2019/0066977 Ion Implantation Method, Ion Implantation Apparatus and Semiconductor Device
An ion implantation method includes changing an ion acceleration energy and/or an ion beam current density of an ion beam while effecting a relative movement...
2019/0066976 Dose-Related Feature Reshaping in an Exposure Pattern to be Exposed in a Multi Beam Writing Apparatus
A method for re-calculating a pattern to be exposed on a target by means of a charged-particle multi-beam writing apparatus is presented. The pattern elements...
2019/0066975 MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PARTICLE BEAM WRITING METHOD
A multiple charged particle beam writing apparatus includes a circuitry to calculate, for each of the plurality of combinations, a first distribution...
2019/0066974 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING THE SAME
A charged particle beam system comprises a particle beam source having a particle emitter at a first voltage, a first electrode downstream of the particle beam...
2019/0066973 Pattern Measuring Method and Pattern Measuring Apparatus
A pattern measuring method and a pattern measuring apparatus that efficiently prevent a measurement error inherent to a device that performs beam scanning in a...
2019/0066972 CHARGED PARTICLE BEAM DEVICE, APERTURE ARRANGEMENT FOR A CHARGED PARTICLE BEAM DEVICE, AND METHOD FOR OPERATING...
The present disclosure provides a charged particle beam device. The charged particle beam device includes a charged particle source configured to emit a...
2019/0066971 IMAGE GENERATION METHOD
A method which can generate a clear image of a specimen by correcting an image drift is disclosed. The image generation method includes: scanning a specimen...
2019/0066970 DRIVER OF SAMPLE HOLDER FOR ELECTRON MICROSCOPE AND STAGE COMPRISING SAME
A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially...
2019/0066969 CHARGED PARTICLE BEAM APPARATUS
There is provided a charged particle beam apparatus including: a charged particle source; a condenser lens and an object lens for converging a charged particle...
2019/0066968 ABERRATION MEASUREMENT METHOD AND ELECTRON MICROSCOPE
An aberration measurement method for an objective lens in an electron microscope including an objective lens which focuses an electron beam that illuminates a...
2019/0066967 ION GENERATOR AND METHOD FOR USING THE SAME
Ion generators for ion implanters are provided. The ion generator for an ion implanter includes an ion source arc chamber including an arc chamber housing and...
2019/0066966 Field Emission Electron Source, Method for Manufacturing Same, and Electron Beam Device
In order to provide a stable hexaboride single-crystal field emission electron source capable of heat-flashing, this field emission electron source is provided...
2019/0066965 RADIATION EMISSION DEVICE
A radiation emission device is provided. The radiation emission device may include a cathode configured to emit an electron beam and an anode configured to...
2019/0066964 Magnetic Support For Journal Bearing Operation At Low And Zero Speeds
A structure and method of operation of a journal bearing is disclosed that minimizes contact of the shaft with the sleeve during start up and slow down of the...
2019/0066963 Creep Resistant Electron Emitter Material And Fabrication Method
In the present invention, a flat emitter is formed by the formation of emitter material wires into a unitary non-porous flat emitter structure. The wires are...
2019/0066962 PHOTOCATHODE INCLUDING SILICON SUBSTRATE WITH BORON LAYER
A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent oxidation of the...
2019/0066961 ENHANCED ELECTRON AMPLIFIER STRUCTURE AND METHOD OF FABRICATING THE ENHANCED ELECTRON AMPLIFIER STRUCTURE
An enhanced electron amplifier structure includes a microporous substrate having a front surface and a rear surface, the microporous substrate including at...
2019/0066960 Electrical Fuse Element
An electric fuse element for arrangement on a printed circuit board is specified. The fuse element is formed as an SMD component and has a cuboidal insulating...
2019/0066959 FUSIBLE SWITCHING DISCONNECT MODULES AND DEVICES WITH TRIPPING COIL
A fusible switch disconnect device includes a housing adapted to receive at least one fuse therein, and a switchable contact for connecting the fuse to...
2019/0066958 NATURALLY CLOSED MEMS SWITCH FOR ESD PROTECTION
The present disclosure generally relates to a MEMS device for reducing ESD. A contacting switch is used to ensure that there is a closed electrical contact...
2019/0066957 THERMAL MANAGEMENT IN HIGH POWER RF MEMS SWITCHES
The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed...
2019/0066955 LOAD CONTROLLER AND LOAD CONTROL METHOD
A plurality of semiconductor relays is provided between a power source and loads. The semiconductor relays have a function of a current detection for detecting...
2019/0066954 FUSE AND TRIP MECHANISM THEREFOR
A trip mechanism for a fuse includes a trip unit disposed within an elongated housing of the fuse, and a processor. The trip unit includes a fuse element and...
2019/0066953 SWITCH DEVICE AND PROTECTIVE DEVICE
A switch device capable of safely opening or short-circuiting an electrical circuit in response to an abnormality such as wetting with water or liquid leaking...
2019/0066952 FLOAT SWITCH
A float switch, including a junction box, a switch, a guide rod, a float, a link mechanism, and a seal assembly. The switch is disposed in the junction box....
2019/0066951 CONTACT APPARATUS
The contact apparatus includes a fixed contact, a movable contact, and an arc extinguishing member. The movable contact is movable between a closed position...
2019/0066950 POWER BREAKING DEVICE
A power breaking pole including a vacuum interrupter including two ends called a lower end and an upper end, respectively, which vacuum interrupter is held...
2019/0066949 HEAVY CURRENT REED SWITCH CONTACT STRUCTURE
A heavy current reed switch contact structure comprises at least one set of elastic reed electrode (11, 12) or at least one fixed electrode (12) and an elastic...
2019/0066948 ROTARY SWITCH DEVICE
A rotary switch device includes a terminal base to which a center portion contact and a fixed contact are fixed, a rotation operation member which is operable...
2019/0066947 KEYBOARD KEY STRUCTURE
The disclosure discloses a keyboard key structure. The keyboard key structure includes a switch circuit board, a first luminescent circuit layer, a switch...
2019/0066946 LIGHT BLOCKERS
In an example, a light blocker may comprise a bellow to extend from an outer edge of a key to an inner edge of a key window to span a key gap in between the...
2019/0066945 SURFACE MOUNT SNAP SWITCH
A surface mount snap switch and method of making the same, including a housing having a plurality of channels formed therein and a cover configured for...
2019/0066944 PHYSICAL BUTTON MECHANISM AND ELECTRONIC DEVICE WITH THE SAME
A physical button mechanism for an electronic device includes a casing and a button mechanism therein mounted. The button mechanism includes a connection...
2019/0066943 ILLUMINATED VANDAL-RESISTANT PUSHBUTTON SWITCH
A pushbutton switch assembly is disclosed which includes a button body housing having a central opening and a mounting ring for mounting in a panel and...
2019/0066942 System for Electric Load Controlling Using Smart Three-way Switches
A circuit for controlling electric load(s) includes two smart switches connected in a three-way circuit configuration. Each of the two smart switches includes...
2019/0066941 ELECTRICAL POWER DISTRIBUTION SYSTEM INCLUDING PRESSURE RELEASE MECHANISM
An electrical power distribution system includes at least one circuit protection device and a housing defining an interior space to receive the at least one...
2019/0066940 ON-LOAD TAP CHANGER
An on-load tap changer of a resistor type includes a selector base plate; a selector mounted on the selector base plate; a diverter switch base plate; a...
2019/0066939 Switching Device
A switching device for breaking an electric current including a main contact carrier, movable and stationary main contacts, the movable contact attached to the...
2019/0066938 SWITCH MONITORING DEVICE, SWITCH STATE DETECTION CIRCUIT, AND A VEHICLE-MOUNTED SWITCH SYSTEM
A switch monitoring device includes a constant current source which supplies a current to an input line or extracts a current from the input line, a switch...
2019/0066937 MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
Systems and methods for forming a magnetostatic MEMS switch include forming a movable beam on a first substrate, forming the electrical contacts on a second...
2019/0066936 METHOD FOR MANUFACTURING CAPACITIVE DEIONIZATION ELECTRODE AND CAPACITIVE DEIONIZATION ELECTRODE MANUFACTURED...
A method for manufacturing a capacitive deionization electrode exhibits enhanced ionic material adsorption efficiency. The method includes (a) kneading an...
2019/0066935 METHOD FOR MANUFACTURING LAMINATED SUPERCAPACITOR
In a method for manufacturing a supercapacitor, a first graphene current collector, a first electrode and a first separating layer are sequentially formed on a...
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