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Patent # Description
2019/0074187 METHOD OF FORMING DENSE HOLE PATTERNS OF SEMICONDUCTOR DEVICES
A method of forming dense hole patterns of semiconductor devices includes: forming a plurality of first pillars on at least one lower hard mask layer disposed...
2019/0074186 Method for Manufacturing a Mask
A mask structure and a method for manufacturing a mask structure for a lithography process is provided. The method includes providing a substrate covered with...
2019/0074185 METHOD OF MANUFACTURING ELEMENT CHIP
Method of manufacturing an element chip which can suppress residual debris in plasma dicing. A back surface of a semiconductor wafer is held on a dicing tape....
2019/0074184 Method for Removal of Matter
The subject matter of the invention is a method of uniformly removing material from a sample surface by sputtering by means of scanning the surface with a...
2019/0074183 METHODS OF FORMING STRUCTURES
A method of forming a structure comprises forming a pattern of self-assembled nucleic acids over a material. The pattern of self-assembled nucleic acids is...
2019/0074182 METHOD OF FORMING FINE ISLAND PATTERNS OF SEMICONDUCTOR DEVICES
A method of forming fine island patterns of semiconductor devices includes: forming first mask pillars on a hard mask layer on a substrate; forming an upper...
2019/0074181 TEMPLATE AND TEMPLATE MANUFACTURING METHOD
According to one embodiment, a template includes a first stepwise structure that includes first level differences and first terraces provided between the first...
2019/0074180 METHOD OF FABRICATING DEVICE INCLUDING TWO-DIMENSIONAL MATERIAL
A method of fabricating a device including a two-dimensional (2D) material includes forming a transition metal oxide pattern on a substrate and forming a...
2019/0074179 METHOD OF FABRICATING DEVICE INCLUDING TWO-DIMENSIONAL MATERIAL
A method of fabricating a device including a two-dimensional (2D) material includes forming an amorphous transition metal oxide structure on a substrate and...
2019/0074178 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
In a first aspect of a present inventive subject matter, a semiconductor device includes a first semiconductor layer that is an electron-supply layer...
2019/0074177 FILM FORMING APPARATUS AND FILM FORMING METHOD
There is provided a film forming apparatus for forming a silicon nitride film on a substrate by having a precursor gas containing silicon to react with a...
2019/0074176 OXIDE WITH HIGHER UTILIZATION AND LOWER COST
Aspects disclosed herein relate to methods of depositing pure silicon oxide on a substrate using Octamethylcyclotetrasiloxane (OMCTS) precursor. In one aspect,...
2019/0074175 TANTALUM COMPOUND
A tantalum compound, a method of forming a thin film, and a method of fabricating an integrated circuit device, the tantalum compound being represented by the...
2019/0074174 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND THE SEMICONDUCTOR DEVICE
Characteristics of a semiconductor device are improved. A method of manufacturing a semiconductor device of the invention includes a step of forming a gate...
2019/0074173 Water-Repellent Protective Film Forming Agent, Liquid Chemical for Forming Water-Repellent Protective Film, and...
Disclosed are a water-repellent protective film forming agent for forming a water-repellent protective film on a silicon element-containing surface of a wafer...
2019/0074172 FILM FORMING METHOD AND PATTERNING METHOD
Examples of a film forming method includes repeating first processing and second processing in this order a plurality of times, wherein the first processing...
2019/0074171 SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
In one embodiment, a semiconductor manufacturing apparatus includes a supporter configured to support a wafer. The apparatus further includes a first member...
2019/0074170 SUB-ATMOSPHERIC PRESSURE LASER IONIZATION SOURCE USING AN ION FUNNEL
A system and method for sample analysis using sub-atmospheric pressure (sub-AP) laser ionization. The sub-AP ion source includes a holder with a sample...
2019/0074169 DETERMINING ISOTOPE RATIOS USING MASS SPECTROMETRY
The present inventive concepts relate to determining an isotope ratio using mass spectrometry. Mass spectra of ions are obtained by generating ions, guiding...
2019/0074168 Optimizing Quadrupole Collision Cell RF Amplitude for Tandem Mass Spectrometry
A mass spectrometer includes a collision cell and a system controller. The collision cell includes a plurality of rod pairs configured to generate...
2019/0074167 FILM FORMATION APPARATUS
A film formation apparatus includes a chamber which has an interior capable of being vacuumed, and which includes a lid that is openable and closable on the...
2019/0074166 PLASMA PROBE DEVICE AND PLASMA PROCESSING APPARATUS
A plasma probe device includes an antenna unit installed at an opening formed in a wall of a processing chamber or a mounting table through a sealing member...
2019/0074165 PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
A plasma processing apparatus includes a process chamber having an inner space, an electrostatic chuck in the process chamber and to which a substrate is...
2019/0074164 REACTION CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
A reaction chamber includes an upper electrode device and a lower electrode device. The lower electrode device is disposed in the reaction chamber for carrying...
2019/0074163 CONDITIONING REMOTE PLASMA SOURCE FOR ENHANCED PERFORMANCE HAVING REPEATABLE ETCH AND DEPOSITION RATES
Embodiments of the present disclosure generally relate to methods for conditioning an interior wall surface of a remote plasma generator. In one embodiment, a...
2019/0074162 GLASS SEALED GAS DISCHARGE TUBES
Glass sealed gas discharge tubes. In some embodiments, a gas discharge tube (GDT) can include an insulator substrate having first and second sides and defining...
2019/0074161 EXPOSURE APPARATUS AND EXPOSURE METHOD, LITHOGRAPHY METHOD, AND DEVICE MANUFACTURING METHOD
An exposure apparatus scans a substrate in a Y-axis direction and also adjusts irradiation position of a plurality of beams, based on correction information...
2019/0074160 SYSTEMS AND METHODS FOR USING MULTIMODAL IMAGING TO DETERMINE STRUCTURE AND ATOMIC COMPOSITION OF SPECIMENS
An imaging system that selectively alternates between a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as...
2019/0074159 SCANNING ELECTRON MICROSCOPE
The present invention enlarges a range of movement of field of view by beam deflection with a simple deflector configuration and suppresses deterioration of a...
2019/0074158 ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
In one embodiment, an ion implantation apparatus includes an ion source configured to generate an ion beam. The apparatus further includes a scanner configured...
2019/0074157 APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit,...
2019/0074156 FILAMENT POSITIONING SYSTEM AND FILAMENT POSITIONING METHOD
Disclosed are a filament positioning system and a filament positioning method. The filament positioning system includes a bottom plate, a first positioning...
2019/0074155 X-RAY GENERATOR
An X-ray generator comprising a target for receiving electrons and generating X-rays, a separator for dividing an internal space of the target into a coolant...
2019/0074154 MULTI-GRID ELECTRON GUN WITH SINGLE GRID SUPPLY
Some embodiments include a system, comprising: a high voltage enclosure; a cathode disposed in the high voltage enclosure; an anode disposed in the high...
2019/0074153 Circuit Interrupter With Status Indication
A circuit interrupter having a status indicator providing a current status of the circuit interrupter, the status indicator presenting one of: an On state, an...
2019/0074152 ELECTROMECHANICAL RELAY DEVICE
A electromechanical relay device (100) comprising a source electrode (102), a beam (104) mounted on the source electrode at a first end and electrically...
2019/0074151 RELAY
The present subject matter provides a relay, including an insulating cover, two static contact bridges, a moving contact bridge, a drive shaft and a driving...
2019/0074150 HYBRID ARC AND GROUND FAULT CIRCUIT INTERRUPTER
In one example, a hybrid circuit interrupter may include a three-coil architecture, first coil circuitry, leakage detection circuitry, and a main processing...
2019/0074149 DC Voltage Switch
Various embodiments may include a DC voltage switch comprising: a first and a second terminal for serial incorporation into a first pole of a DC voltage...
2019/0074148 ELECTROMAGNETICALLY MOVING DEVICE
In an electromagnetically moving device 100, a magnetic-flux variation measuring unit 3 is placed at a position which is outside a closed magnetic path...
2019/0074147 CONNECTION DEVICE AND METHOD FOR ELECTRICALLY CONNECTING AN ELECTRIC MOTOR TO AN ELECTRONIC SWITCHING UNIT,...
A connecting device may electrically connect an electric motor to an electronic switchgear unit. The connecting device may include a bus bar that has a first...
2019/0074146 SWITCHING DEVICE AND SYSTEM FOR SWITCHING ON AND OFF AN ELECTRICAL LOAD
A switching device for switching an electrical load on or off has an internal energy store which, when the supply voltage is switched off, may deliver the...
2019/0074145 PIN CONFIGURABLE SMART CURRENT SENSOR
A method of regulating the operation of an electrical system, the electrical system including, a contactor unit including a contactor and a conductive element,...
2019/0074144 GENERATOR SWITCH WITH A COOLING DEVICE
A generator switch including an encapsulation lying at ground potential and an electrical conductor arranged in an insulated fashion inside the encapsulation...
2019/0074143 DOPING SYSTEM, AND METHOD FOR MANUFACTURING ELECTRODES, BATTERIES AND CAPACITORS
Provided is a doping system in which an active material in a strip-shaped electrode precursor having a layer including an active material is doped with alkali...
2019/0074142 MULTILAYERED GRAPHENE AND METHODS OF MAKING THE SAME
The present invention relates in part to a method of fabricating graphene structures from graphene oxide by reducing the graphene oxide on a patterned...
2019/0074141 METHOD FOR MANUFACTURING ULTRA-CAPACITY BATTERY
A method for manufacturing an ultra-capacity battery includes providing cathodes and anodes. Providing the cathodes includes providing a first substrate having...
2019/0074140 MULTIFUNCTIONAL OPTOELECTRONIC DEVICES BASED ON PEROVSKITES
Embodiments of the present disclosure provide methods of growing halide films (e.g., single crystal halide perovskites or multi-crystal halide perovskites) on...
2019/0074139 ELECTROLYTIC CAPACITOR AND CONDUCTIVE POLYMER DISPERSION FOR MANUFACTURING ELECTROLYTIC CAPACITOR
An electrolytic capacitor includes an anode body, a dielectric layer formed on the anode body, and a solid electrolyte layer covering at least a portion of the...
2019/0074138 MULTILAYER CERAMIC CAPACITOR AND METHOD OF MANUFACTURING THE SAME
A multilayer ceramic capacitor includes a body a first internal electrode and a second internal electrode disposed with a dielectric layer interposed...
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