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Patent # Description
2019/0094720 TREATMENT ASSEMBLY OF THE WATER-BASED LIQUID USED IN A WASHING STATION FOR FLEXOGRAPHIC PLATES
The present invention relates to a unit and a method for treating the water-based washing liquid used in or by a washing station of flexographic plates. The...
2019/0094719 Apparatus and a Method of Forming a Particle Shield
An apparatus for generating a laminar flow includes an injection nozzle and a suction nozzle. The injection nozzle and the suction nozzle are operable to form...
2019/0094718 RADIATION SOURCE APPARATUS, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR DECREASING DEBRIS IN EUV LITHOGRAPHY SYSTEM
A radiation source apparatus is provided. The radiation source apparatus includes a chamber, a target droplet generator, an exhaust module, a measuring device,...
2019/0094717 LIGHT SOURCE, EUV LITHOGRAPHY SYSTEM, AND METHOD FOR GENERATING EUV RADIATION
A light source for extreme ultraviolet (EUV) radiation is provided. The light source includes a target droplet generator, a laser generator, a measuring...
2019/0094716 Humidity Control in EUV Lithography
A photo-sensitive layer is applied over a wafer. The photo-sensitive layer is exposed. In some embodiments, the photo-sensitive layer is exposed to EUV light....
2019/0094715 VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY
A vacuum system for extracting a stream of a multi-phase fluid from a photo-lithography tool comprises a pumping arrangement for drawing the fluid from the...
2019/0094714 LARGE LOAD-BEARING GUIDE MECHANISM AND MULTI-DOF LARGE-STROKE HIGH-PRECISION MOTION PLATFORM SYSTEM
The present invention also discloses a multi-DOF (Degree of Freedom) large-stroke high-precision motion platform system using the guide mechanism. A large...
2019/0094713 METHOD FOR ADJUSTING ACTUATION OF A LITHOGRAPHIC APPARATUS
A lithographic apparatus is a machine that applies a desired pattern onto a substrate, usually onto a target portion of the substrate. A functional ...
2019/0094712 METROLOGY METHOD AND APPARATUS, SUBSTRATE, LITHOGRAPHIC SYSTEM AND DEVICE MANUFACTURING METHOD
In a dark-field metrology method using a small target, a characteristic of an image of the target, obtained using a single diffraction order, is determined by...
2019/0094711 Detection And Measurement Of Dimensions Of Asymmetric Structures
Methods and systems for performing spectroscopic measurements of asymmetric features of semiconductor structures are presented herein. In one aspect,...
2019/0094710 Optical Proximity Correction Methodology Using Underlying Layer Information
Examples of optical proximity correction (OPC) based computational lithography techniques are disclosed herein. An exemplary method includes receiving an IC...
2019/0094709 METHOD, SYSTEM, AND STORAGE MEDIUM FOR RESOLVING COLORING CONFLICT IN MULTI-PATTERNING LITHOGRAPHY
A method performed by at least one processor includes: accessing a layout of an integrated circuit (IC), where the layout includes a plurality of patterns in...
2019/0094708 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
An exposure apparatus includes a projection optical system, a substrate stage which is movable and has a holder to hold a substrate, and a detection apparatus...
2019/0094707 LITHOGRAPHIC APPARATUS AND SURFACE CLEANING METHOD
An apparatus and method for cleaning a contaminated surface of a lithographic apparatus are provided. A liquid confinement structure comprises at least two...
2019/0094706 METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
The present disclosure, in some embodiments, relates to a photolithography tool. The photolithography tool includes an illumination source configured to...
2019/0094705 OPTICAL IMAGING ARRANGEMENT WITH A PIEZOELECTRIC DEVICE
An optical imaging arrangement includes an optical element unit, and an actuator device connected to the optical element unit and is configured to be connected...
2019/0094704 POLARIZATION-MODULATING OPTICAL ELEMENT
A microlithography optical system includes a projection objective and an illumination system that includes a temperature compensated polarization-modulating...
2019/0094703 Method to Determine a Patterning Process Parameter
A method to determine a patterning process parameter, the method comprising: for a target, calculating a first value for an intermediate parameter from data...
2019/0094702 METROLOGY METHOD AND DEVICE
An inspection apparatus, including: an objective configured to receive diffracted radiation from a metrology target having positive and negative diffraction...
2019/0094701 EXPOSURE METHOD AND EXPOSURE DEVICE
An exposure method for projecting a pattern on an exposure mask onto a work by an exposure control of an exposure light including calculating an exposure...
2019/0094700 CHUCK, SUBSTRATE-HOLDING APPARATUS, PATTERN-FORMING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
A chuck according to an embodiment of the present invention includes first and second support portions 10 each of which has a repetition structure of a convex...
2019/0094699 EUV COLLECTOR
An EUV collector for use in an EUV projection exposure apparatus includes at least one mirror surface having surface structures for scattering a used EUV...
2019/0094698 METHODS FOR SENSITIZING PHOTORESIST USING FLOOD EXPOSURES
A patterning method is provided in which a light-sensitive layer is formed, and a target resolution is defined for a pattern to be formed in a target layer....
2019/0094697 EDGE-EXPOSURE TOOL WITH AN ULTRAVIOLET (UV) LIGHT EMITTING DIODE (LED)
Various embodiments of the present application are directed towards an edge-exposure tool with a light emitting diode (LED), as well as a method for edge...
2019/0094696 EXPOSURE APPARATUS AND METHOD FOR EXPOSURE OF TRANSPARENT SUBSTRATE
An exposure apparatus includes a carrying device and a UV light generation device that irradiate a transparent substrate positioned on the carrying device. The...
2019/0094695 COMPOSITION FOR FILM FORMATION, FILM, RESIST UNDERLAYER FILM-FORMING METHOD, PRODUCTION METHOD OF PATTERNED...
The composition for film formation includes a compound including a group of the formula (1) and a solvent. In the formula (1), R.sup.1 to R.sup.4 each...
2019/0094694 POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION, POSITIVE TYPE PLANOGRAPHIC PRINTING PLATE PRECURSOR, AND METHOD...
Provided is a positive type photosensitive resin composition including: a polymer compound which contains, in a main chain thereof, a sulfonamide group and a...
2019/0094693 PHOTOSENSITIVE RESIN COMPOSITION, TRANSFER FILM, DECORATIVE PATTERN, TOUCH PANEL, AND MANUFACTURING METHOD OF...
Provided are a photosensitive resin composition including a binder having a weight-average molecular weight of 4,000 to 25,000, a polymerization initiator...
2019/0094692 PHOTOSENSITIVE RESIN COMPOSITION, CURED FILM, DISPLAY DEVICE, AND PATTERN FORMING METHOD
A photosensitive resin composition which gives a cured film having high light shielding properties and enables stable curing by baking at low temperature, a...
2019/0094691 RADIATION-SENSITIVE COMPOSITION AND PATTERN-FORMING METHOD
A radiation-sensitive composition includes: particles including a metal oxide as a principal component; a radiation-sensitive acid generator; and an acid...
2019/0094690 RESIST COMPOSITION AND PATTERNING PROCESS
A resist composition is provided comprising a base polymer containing an iodized polymer, and an acid generator containing a sulfonium salt and/or iodonium...
2019/0094689 RADIATION-SENSITIVE COMPOSITION AND PATTERN-FORMING METHOD
A radiation-sensitive composition includes: particles including a metal oxide as a principal component; an aggregation inhibiting agent for inhibiting...
2019/0094688 XANTHENE DYE
A colored composition of the present invention includes a dye compound having an anionic moiety including at least one of a structure represented by the...
2019/0094687 SHAPING APPARATUS AND ARTICLE MANUFACTURING METHOD
A shaping apparatus that shapes a composition on a substrate by using a mold, includes a substrate positioning mechanism for positioning the substrate, a mold...
2019/0094686 PULSED LIGHT GENERATION DEVICE, PULSED LIGHT GENERATION METHOD, EXPOSURE APPARATUS HAVING PULSED LIGHT...
A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth...
2019/0094685 VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Vacuum-integrated photoresist-less methods and apparatuses for forming metal hardmasks can provide sub-30 nm patterning resolution. A metal-containing (e.g.,...
2019/0094684 CRITICAL DIMENSION MEASUREMENT SYSTEM AND METHOD OF MEASURING CRITICAL DIMENSIONS USING SAME
A critical dimension measurement system includes a voltage measurement circuit, a control circuit, and a critical dimension measurement circuit. The voltage...
2019/0094683 PELLICLE REMOVAL METHOD
A method of removing a pellicle from a photomask includes removing a portion of a membrane from a pellicle frame, wherein the pellicle frame remains attached...
2019/0094682 NOVEL APPROACH FOR ULTRA THIN-FILM TRANSFER AND HANDLING
A method for forming a pellicle apparatus involves forming a device substrate by depositing one or more pellicle layers defined over a base device layer, where...
2019/0094681 PHOTOETCHING MASK PLATE, MANUFACTURE METHOD THEREOF, AND PHOTOETCHING METHOD
The present disclosure provides a photoetching mask plate, a method for manufacturing the photoetching mask plate, and a photoetching method using the...
2019/0094680 Method of Mask Simulation Model for OPC and Mask Making
The present disclosure provides an integrated circuit (IC) method in accordance with some embodiments. The method includes building a mask model to simulate a...
2019/0094679 METHOD OF MAKING SILVER-CONTAINING DISPERSIONS
A method is used to prepare silver nanoparticles in the form of a silver nanoparticle cellulosic polymeric composite. A cellulosic polymer, organic solvent...
2019/0094678 PSEUDO-VOLUMETRIC DISPLAY APPARATUS AND METHODS
A pseudo-volumetric display apparatus includes a first inwardly facing image display surface having a continuous geometry, with an open upper end, for...
2019/0094677 IMAGE READING APPARATUS AND IMAGE FORMING APPARATUS
An image reading apparatus comprises a housing having a document table glass, a scanner section, a cover member, an adsorption board, a driving section and a...
2019/0094676 DUST-PROOF CASE, LIGHT SOURCE UNIT AND PROJECTOR
A dust-proof case includes a case main body having a lid member resting surface that is formed on an outer circumferential portion and a wall portion that is...
2019/0094674 ADJUSTING DEVICE FOR LIGHT-PIPE AND PROJECTOR
An adjusting device for a light-pipe includes an outer tube, a rotatable ball, an inner tube and an adjustment member. The inner tube is configured to...
2019/0094673 LASER ARRAY, LASER LIGHT SOURE AND LASER PROJECTION DEVICE
A laser array including at least one line of lasers. The at least one line of lasers includes a first laser and a second laser which are adjacent to each...
2019/0094672 ILLUMINATION DEVICE AND PROJECTOR
An illumination device according to the invention includes a light source section including a plurality of light emitting devices adapted to emit light, and a...
2019/0094671 PHOSPHOR WHEEL, PHOSPHOR WHEEL DEVICE INCLUDING THE SAME, LIGHT CONVERSION DEVICE, AND PROJECTION DISPLAY APPARATUS
A phosphor wheel includes a first face that has a phosphor layer, a second face located on an opposite side to the first face, a first blade provided to...
2019/0094670 OPTICAL SYSTEM AND IMAGE PROJECTION APPARATUS
An optical system includes, in order from a reduction conjugate side to an enlargement conjugate side, a refractive optical unit having a positive refractive...
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