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Patent # Description
US-1,024,2867 Gate pickup method using metal selectivity
A method of fabricating a FinFET device includes forming contact openings for source/drain contacts prior to performing a replacement metal gate (RMG) module....
US-1,024,2866 Selective deposition of silicon nitride on silicon oxide using catalytic control
It will be understood that in some embodiments, nitrogen-containing ligands bonded to the silicon may not necessarily be identical to another ...
US-1,024,2865 Robust high performance low hydrogen silicon carbon nitride (SiCNH) dielectrics for nano electronic devices
A method for depositing a dielectric layer that includes introducing a substrate into a process chamber of a deposition tool; and heating the substrate to a...
US-1,024,2864 High temperature atomic layer deposition of silicon oxide thin films
Atomic layer deposition (ALD) process formation of silicon oxide with temperature >500.degree. C. is disclosed. Silicon precursors used have a formula of:...
US-1,024,2863 Substrate processing apparatus
A substrate processing apparatus for processing a wafer including a temporary substrate and a semiconductor device. The substrate processing apparatus includes...
US-1,024,2862 Post-CMP hybrid wafer cleaning technique
A brush-cleaning apparatus is disclosed for use in cleaning a semiconductor wafer after polishing. Embodiments of the brush-cleaning apparatus implemented with...
US-1,024,2861 Processing apparatus, processing method, and manufacturing method of electronic device
According to one embodiment, a processing apparatus includes a first supply section, a second supply section, a gas supply section, and a sublimation section....
US-1,024,2860 Electrostatic trap
An electrostatic trap such as an orbitrap is disclosed, with an electrode structure. An electrostatic trapping field of the form U'(r, .PHI., z) is generated to...
US-1,024,2859 MEMS-based 3D ion trapping device for using laser penetrating ion trapping structure, and method for...
An ion trap device is disclosed with a method of manufacturing thereof including a substrate, first and second RF electrode rails, first and second DC...
US-1,024,2858 Collision ion generator and separator
According to some embodiments, systems and methods for surface impact ionization of liquid phase and aerosol samples are provided. The method includes...
US-1,024,2857 Ion traps with Y-directional ion manipulation for mass spectrometry and related mass spectrometry systems and...
A miniature electrode apparatus is disclosed for trapping charged particles, the apparatus includes, along a longitudinal direction, a first end cap electrode,...
US-1,024,2856 Systems and methods for relay ionization
The invention generally relates to systems and methods for relay ionization of a sample. In certain aspects, the invention provides systems that include an ion...
US-1,024,2855 Detector, system and method for droplet and/or cluster beam spectroscopy
A beam ionization gauge (BIG) detector is disclosed for use in spectroscopy and configured to receive an analyte beam along a beam path. The BIG detector...
US-1,024,2854 Fourier transform mass spectrometry
Disclosed is a method of quantification of one or more ion species, in a sample of ions, using a mass spectrometer, the method including the steps of: ...
US-1,024,2853 Intelligent target-based acquisition
A method of mass spectrometry comprises ionizing a sample eluting from a separation device in order to generate a plurality of parent ions. The method further...
US-1,024,2852 Mass spectrometric determination of fatty acids
The invention relates to the detection of fatty acids. In a particular aspect, the invention relates to methods for detecting very long chain fatty acids and...
US-1,024,2851 Using theoretical collision cross section ("CCS") in sample identification
A method of mass spectrometry is disclosed that comprises predicting 1 one or more first reaction products which may result from subjecting an analyte to one or...
US-1,024,2850 Offline mass calibration
A method includes producing ions from one or more calibrant species and delivering the ions to a mass analyzer, and measuring a first set of mass related...
US-1,024,2849 System and method for detecting a process point in multi-mode pulse processes
A system and method of identifying a selected process point in a multi-mode pulsing process includes applying a multi-mode pulsing process to a selected wafer...
US-1,024,2848 Carrier ring structure and chamber systems including the same
A carrier ring for use in a chamber implemented for depositing films and chambers that use the carrier ring are provided. The carrier ring has an annular disk...
US-1,024,2847 Plasma processing apparatus and liner assembly for tuning electrical skews
The invention discloses a plasma processing apparatus comprising a chamber lid, a chamber body and a support assembly. The chamber body, defining a processing...
US-1,024,2846 Hollow cathode ion source
An ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice...
US-1,024,2845 Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma...
A substrate is positioned on a substrate support structure within a plasma processing volume of an inductively coupled plasma processing chamber. A first...
US-1,024,2844 Rotating RF electric field antenna for uniform plasma generation
A plasma processing chamber includes a substrate support for receiving and holding a substrate. A window in the plasma processing chamber is oriented over the...
US-1,024,2843 Apparatus for large area plasma processing
An apparatus for large area plasma processing according to the invention comprises at least one plane antenna (A) having a plurality of interconnected...
US-1,024,2842 Method for cross-section processing and observation and apparatus therefor
A method for cross-section processing and observation, and apparatus therefor, includes performing a position information obtaining process of observing the...
US-1,024,2841 Specimen holder
The purpose of the present invention is to provide a specimen holder having a structure capable of maintaining a seal surface regardless of a change of...
US-1,024,2840 Energy filter for processing a power semiconductor device
A method of producing an implantation ion energy filter, suitable for processing a power semiconductor device. In one example, the method includes creating a...
US-1,024,2839 Reduced Coulomb interactions in a multi-beam column
Performance of a multi-electron-beam system can be improved by reducing Coulomb effects in the illumination path of a multi-beam inspection system. A...
US-1,024,2838 X-ray generating unit and radiographic apparatus
A radiographic apparatus including a target array and an X-ray detecting unit. The target array includes a plurality of targets and a forward shielding member....
US-1,024,2837 Anode and X-ray generating tube, X-ray generating apparatus, and radiography system that use the anode
Provided is an anode for an X-ray generating tube, which reduces a drop in the quality of an emitted X-ray due to the history of X-ray emitting operation. A...
US-1,024,2836 Devices having an electron emitting structure
The disclosure relates to an image capture device comprising an electron receiving construct and an electron emitting construct, and further comprising an inner...
US-1,024,2835 Harness holder, power equipment unit, and vehicle
A harness holder for holding a harness therein, includes: a holder main body whose upper portion is open; a holder cover which covers the upper portion of the...
US-1,024,2834 Method and device for determining direction of current flowing through circuit breaker
A method and device are disclosed for determining the direction of current flowing through a circuit breaker. An embodiment includes obtaining a sample value of...
US-1,024,2833 Systems, apparatus, and methods for accessory tripping and resetting of electric circuit breakers
Systems, apparatus, and methods for accessory tripping and resetting of circuit breakers are disclosed. Embodiments of the invention include a breaker handle; a...
US-1,024,2832 High voltage circuit breaker
An improved circuit breaker is disclosed herein. The improved circuit breaker includes one or more main contacts and only one resistor contact. The only one...
US-1,024,2831 Electrical switching apparatus and shunt tab assembly therefor
A shunt tab assembly is for an electrical switching apparatus, such as a circuit breaker. The electrical switching apparatus includes a housing, separable...
US-1,024,2830 Boom mountable breaker and methods of using same
A boom mountable breaker system and a method of using same for interrupting electrical transmission through a portion of an energized conductor downstream of a...
US-1,024,2829 Electromagnetic relay and coil terminal
An electromagnetic relay includes: a base; a pair of fixed contact terminals, each including a fixed contact and a first fulcrum fixed to the base; a movable...
US-1,024,2828 Method for monitoring the state of the earthing contacts of a contactor controllable by means of an exciter coil
The present invention relates to a method for monitoring the state of the earthing contacts of a contactor controlled by an exciter coil, said contactor being...
US-1,024,2827 Electrically controlled switching device including shape memory alloy element
An electrically controlled switching device includes a support, a first contact coupled to the support, a second contact coupled to the support, an SMA element...
US-1,024,2826 Electric power distribution switchgear and method of breaking an electric power current
An electric power distribution switchgear is connected between an electric power grid and an electric power equipment. The switchgear includes a synchronized...
US-1,024,2825 High voltage switch vacuum interrupter
A vacuum interrupter for a high voltage air break switch is disclosed. The interrupter has a plurality of load interrupter contacts enclosed in axially aligned...
US-1,024,2824 Lockout device for switchgear
A safety lockout device for switchgear includes a movable member adapted to be moved from a first position to a second position. A switch is adapted to...
US-1,024,2823 Guard door monitoring system
A guard door monitoring system comprising a guard door monitoring module for monitoring a state of a guard door to a safety area. The guard door monitoring...
US-1,024,2822 Switching device with a suspended mobile contact assembly
The present application contemplates a switching device comprising: an outer casing defining an internal volume of the switching device; one or more electric...
US-1,024,2821 Localized key-click feedback
Disclosed herein are techniques and systems for providing simulated, haptic feedback that is local to physical, non-actuating keys of a keyboard. A keyboard...
US-1,024,2820 Luminous keyboard
A luminous keyboard includes plural keys, a membrane switch circuit member, a supporting plate and a backlight module. The membrane switch circuit member is...
US-1,024,2819 Mechanical key structure
A key structure includes a supporting plate, a triggering switch, a keycap and a soft element. The triggering switch is located over the supporting plate. The...
US-1,024,2818 Key structure employing a dome and scissor-type support
A key structure includes a switch circuit board, a triggering assembly, a keycap and an elastic element. The triggering assembly is disposed over the switch...
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